发明授权
US07611319B2 Methods and apparatus for identifying small lot size substrate carriers
失效
用于识别小批量衬底载体的方法和装置
- 专利标题： Methods and apparatus for identifying small lot size substrate carriers
- 专利标题（中）： 用于识别小批量衬底载体的方法和装置
-
申请号： US11154932申请日： 2005-06-16
-
公开(公告)号： US07611319B2公开(公告)日： 2009-11-03
- 发明人: Vinay Shah , Martin R. Elliott , Jeffrey C. Hudgens , Eric Andrew Englhardt
- 申请人： Vinay Shah , Martin R. Elliott , Jeffrey C. Hudgens , Eric Andrew Englhardt
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan, PC
- 主分类号： B65B69/00
- IPC分类号： B65B69/00
摘要：
In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are adapted to block docking of substrate carriers that do not include the first docking features and to allow docking of substrate carriers that include the first docking features. Numerous other aspects are provided.