发明授权
US07611931B2 Semiconductor structures with body contacts and fabrication methods thereof
有权
具有身体接触的半导体结构及其制造方法
- 专利标题: Semiconductor structures with body contacts and fabrication methods thereof
- 专利标题(中): 具有身体接触的半导体结构及其制造方法
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申请号: US11928135申请日: 2007-10-30
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公开(公告)号: US07611931B2公开(公告)日: 2009-11-03
- 发明人: Kangguo Cheng , Ramachandra Divakaruni , Jack Allan Mandelman
- 申请人: Kangguo Cheng , Ramachandra Divakaruni , Jack Allan Mandelman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Wood, Herron & Evans, LLP
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A semiconductor structure for a dynamic random access memory (DRAM) cell array that includes a plurality of vertical memory cells built on a semiconductor-on-insulator (SOI) wafer and a body contact electrically coupling a semiconductor body and a semiconductor substrate of the SOI wafer. The semiconductor body includes a channel region for the access device of one of the vertical memory cells. The body contact, which extends through a buried dielectric layer of the SOI wafer, provides a current leakage path that reduces the impact of floating body effects upon the vertical memory cell. The body contact may be formed by etching a via that extends through the semiconductor body and buried dielectric layer of the SOI wafer and extends into the substrate and partially filling the via with a conductive material that electrically couples the semiconductor body with the substrate.
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