Invention Grant
- Patent Title: Apparatus and method for probing integrated circuits using laser illumination
- Patent Title (中): 使用激光照明探测集成电路的装置和方法
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Application No.: US11169423Application Date: 2005-06-29
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Publication No.: US07616312B2Publication Date: 2009-11-10
- Inventor: Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
- Applicant: Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
- Applicant Address: US CA Fremont
- Assignee: DCG Systems, Inc.
- Current Assignee: DCG Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
Public/Granted literature
- US20070002329A1 Laser probing system for integrated circuits Public/Granted day:2007-01-04
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