发明授权
US07622151B2 Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions 失效
使用甲醇溶液的等离子体增强化学气相沉积方法

  • 专利标题: Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions
  • 专利标题(中): 使用甲醇溶液的等离子体增强化学气相沉积方法
  • 申请号: US10772740
    申请日: 2004-02-05
  • 公开(公告)号: US07622151B2
    公开(公告)日: 2009-11-24
  • 发明人: Yonhua Tzeng
  • 申请人: Yonhua Tzeng
  • 申请人地址: US AL Auburn
  • 专利权人: Auburn University
  • 当前专利权人: Auburn University
  • 当前专利权人地址: US AL Auburn
  • 代理机构: Haverstock & Owens LLP
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00 C23C16/26
Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions
摘要:
Briefly described, methods of forming diamond are described. A representative method, among others, includes: providing a substrate in a reaction chamber in a non-magnetic-field microwave plasma system; introducing, in the absence of a gas stream, a liquid precursor substantially free of water and containing methanol and at least one carbon and oxygen containing compound having a carbon to oxygen ratio greater than one, into an inlet of the reaction chamber; vaporizing the liquid precursor; and subjecting the vaporized precursor, in the absence of a carrier gas and in the absence in a reactive gas, to a plasma under conditions effective to disassociate the vaporized precursor and promote diamond growth on the substrate in a pressure range from about 70 to 130 Torr.
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