发明授权
- 专利标题: Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions
- 专利标题(中): 使用甲醇溶液的等离子体增强化学气相沉积方法
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申请号: US10772740申请日: 2004-02-05
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公开(公告)号: US07622151B2公开(公告)日: 2009-11-24
- 发明人: Yonhua Tzeng
- 申请人: Yonhua Tzeng
- 申请人地址: US AL Auburn
- 专利权人: Auburn University
- 当前专利权人: Auburn University
- 当前专利权人地址: US AL Auburn
- 代理机构: Haverstock & Owens LLP
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C16/26
摘要:
Briefly described, methods of forming diamond are described. A representative method, among others, includes: providing a substrate in a reaction chamber in a non-magnetic-field microwave plasma system; introducing, in the absence of a gas stream, a liquid precursor substantially free of water and containing methanol and at least one carbon and oxygen containing compound having a carbon to oxygen ratio greater than one, into an inlet of the reaction chamber; vaporizing the liquid precursor; and subjecting the vaporized precursor, in the absence of a carrier gas and in the absence in a reactive gas, to a plasma under conditions effective to disassociate the vaporized precursor and promote diamond growth on the substrate in a pressure range from about 70 to 130 Torr.
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