发明授权
- 专利标题: Test structures for electrically detecting back end of the line failures and methods of making and using the same
- 专利标题(中): 用于电检测线路故障的后端的测试结构及其制造和使用方法
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申请号: US11776114申请日: 2007-07-11
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公开(公告)号: US07622737B2公开(公告)日: 2009-11-24
- 发明人: Mukta G. Farooq , Xiao H. Liu , Ian D. Melville
- 申请人: Mukta G. Farooq , Xiao H. Liu , Ian D. Melville
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Katherine Brown
- 主分类号: H01L23/58
- IPC分类号: H01L23/58 ; H01L21/00
摘要:
Test structures for electrically detecting BEOL failures are provided. In an embodiment, the structure comprises: an input/output connection disposed above a primary conductive pad which is embedded in an insulator; a dielectric layer disposed upon the insulator; a primary via extending through the dielectric layer down to the primary conductive pad for providing electrical connection between the input/output connection and the primary conductive pad; and a secondary via filled with a conductive material in electrical connection with the input/output connection, the secondary via extending through the dielectric layer down to a secondary interconnect in electrical connection with a secondary conductive pad that is insulated from the primary conductive pad.
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