发明授权
US07622737B2 Test structures for electrically detecting back end of the line failures and methods of making and using the same 失效
用于电检测线路故障的后端的测试结构及其制造和使用方法

Test structures for electrically detecting back end of the line failures and methods of making and using the same
摘要:
Test structures for electrically detecting BEOL failures are provided. In an embodiment, the structure comprises: an input/output connection disposed above a primary conductive pad which is embedded in an insulator; a dielectric layer disposed upon the insulator; a primary via extending through the dielectric layer down to the primary conductive pad for providing electrical connection between the input/output connection and the primary conductive pad; and a secondary via filled with a conductive material in electrical connection with the input/output connection, the secondary via extending through the dielectric layer down to a secondary interconnect in electrical connection with a secondary conductive pad that is insulated from the primary conductive pad.
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