Invention Grant
- Patent Title: Method for making an electromechanical component on a plane substrate
- Patent Title (中): 在平面基板上制造机电部件的方法
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Application No.: US11904859Application Date: 2007-09-27
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Publication No.: US07625772B2Publication Date: 2009-12-01
- Inventor: Fabrice Casset , Cedric Durand , Pascal Ancey
- Applicant: Fabrice Casset , Cedric Durand , Pascal Ancey
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Nixon Peabody LLP
- Priority: FR0653975 20060927
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Method for making an electromechanical component on a plane substrate and comprising at least one structure vibrating in the plane of the substrate and actuation electrodes. The method comprises at least the following steps in sequence: formation of the substrate comprising one silicon area partly covered by two insulating areas, formation of a sacrificial silicon and germanium alloy layer by selective epitaxy starting from the uncovered part of the silicon area, formation of a strongly doped silicon layer by epitaxy, comprising a monocrystalline area arranged on said sacrificial layer and two polycrystalline areas arranged on insulating areas, simultaneous formation of the vibrating structure and actuation electrodes, by etching of a predetermined pattern in the monocrystalline area designed to form spaces between the electrodes and the vibrating structure, elimination of said sacrificial silicon and germanium alloy layer by selective etching.
Public/Granted literature
- US20080076211A1 Method for making an electromechanical component on a plane substrate Public/Granted day:2008-03-27
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