发明授权
US07626224B2 Semiconductor device with split gate memory cell and fabrication method thereof
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具有分离栅极存储单元的半导体器件及其制造方法
- 专利标题: Semiconductor device with split gate memory cell and fabrication method thereof
- 专利标题(中): 具有分离栅极存储单元的半导体器件及其制造方法
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申请号: US11531295申请日: 2006-09-13
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公开(公告)号: US07626224B2公开(公告)日: 2009-12-01
- 发明人: Yue-Der Chih , Shine Chung , Wen-Ting Chu
- 申请人: Yue-Der Chih , Shine Chung , Wen-Ting Chu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Thomas, Kayden, Horstemeyer & Risley
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A split gate memory cell. First and second well regions of respectively first and second conductivity types are formed in the substrate. A floating gate is disposed on a junction of the first and second well regions and insulated from the substrate. A control gate is disposed over the sidewall of the floating gate and insulated from the substrate and the floating gate and partially extends to the upper surface of the floating gate. A doping region of the first conductivity type is formed in the second well region. The first well region and the doping region respectively serve as source and drain regions of the split gate memory cell.
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