发明授权
- 专利标题: Optical integrated device
- 专利标题(中): 光学集成器件
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申请号: US12181448申请日: 2008-07-29
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公开(公告)号: US07627212B2公开(公告)日: 2009-12-01
- 发明人: Shinsuke Tanaka , Kazumasa Takabayashi , Ayahito Uetake
- 申请人: Shinsuke Tanaka , Kazumasa Takabayashi , Ayahito Uetake
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP.
- 优先权: JP2007-218880 20070824
- 主分类号: G02B6/34
- IPC分类号: G02B6/34 ; G02B6/26 ; G02B6/42 ; G02B6/10
摘要:
An optical integrated device includes an optical waveguide structure formed on a semiconductor substrate and including a plurality of first channel optical waveguide portions, an optical coupler portion and a second channel optical waveguide portion, a burying layer formed from a semi-insulating semiconductor material and burying the optical waveguide structure therein such that an upper portion thereof forms a flat face and a side portion thereof forms an inclined face having a predetermined angle with respect to the semiconductor substrate, and a plurality of dummy structure bodies provided over a desired region in the proximity of at least an output side of the optical coupler portion so that radiation light from the optical coupler portion is spatially separated from signal light propagating along the second channel optical waveguide portion. The plural dummy structure bodies are provided discretely so as to be buried flat by the burying layer.
公开/授权文献
- US20090052834A1 OPTICAL INTEGRATED DEVICE 公开/授权日:2009-02-26
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