发明授权
- 专利标题： MEMS device and method of reducing stiction in a MEMS device
- 专利标题（中）： MEMS器件和减少MEMS器件中的静电的方法
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申请号： US11489789申请日： 2006-07-19
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公开(公告)号： US07628072B2公开(公告)日： 2009-12-08
- 发明人: Daniel N. Koury, Jr. , Andrew C. McNeil
- 申请人： Daniel N. Koury, Jr. , Andrew C. McNeil
- 申请人地址： US TX Austin
- 专利权人： Freescale Semiconductor, Inc.
- 当前专利权人： Freescale Semiconductor, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Ingrassia, Fisher & Lorenz, P.C.
- 主分类号： G01P15/125
- IPC分类号： G01P15/125
摘要：
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
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