发明授权
- 专利标题: Metal contact RF MEMS single pole double throw latching switch
- 专利标题(中): 金属接触RF MEMS单刀双掷闭锁开关
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申请号: US11845602申请日: 2007-08-27
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公开(公告)号: US07629194B1公开(公告)日: 2009-12-08
- 发明人: James H. Schaffner , Tsung-Yuan Hsu , Adele E. Schmitz , Hui-Pin Hsu
- 申请人: James H. Schaffner , Tsung-Yuan Hsu , Adele E. Schmitz , Hui-Pin Hsu
- 申请人地址: US CA Malibu
- 专利权人: HRL Laboratories, LLC
- 当前专利权人: HRL Laboratories, LLC
- 当前专利权人地址: US CA Malibu
- 代理机构: Ladas & Parry
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.
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