Invention Grant
- Patent Title: X-ray tube and X-ray analysis apparatus
- Patent Title (中): X射线管和X射线分析仪
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Application No.: US12175768Application Date: 2008-07-18
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Publication No.: US07634054B2Publication Date: 2009-12-15
- Inventor: Yoshiki Matoba , Yutaka Ikku
- Applicant: Yoshiki Matoba , Yutaka Ikku
- Applicant Address: JP Chiba
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2007-196819 20070728
- Main IPC: G01N23/223
- IPC: G01N23/223 ; H01J35/18

Abstract:
Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing (2) having an interior in a vacuum state and a window section (1) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source (3) provided in the vacuum casing (2), to emit an electron beam (e); a target (T) provided in the vacuum casing (2) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section (1) to an exterior sample (S); an X-ray detection element (4) provided in the vacuum casing (2) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section (1), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member (10) provided between the X-ray detection element (4) and an irradiated area of the target (T) with the electron beam (e).
Public/Granted literature
- US20090041196A1 X-RAY TUBE AND X-RAY ANALYSIS APPARATUS Public/Granted day:2009-02-12
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