发明授权
- 专利标题: Transistor gate electrode having conductor material layer
- 专利标题(中): 具有导体材料层的晶体管栅电极
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申请号: US11715703申请日: 2007-03-08
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公开(公告)号: US07642610B2公开(公告)日: 2010-01-05
- 发明人: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- 申请人: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff Taylor & Zafman LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
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