发明授权
- 专利标题: Optical image measurement device
- 专利标题(中): 光学图像测量装置
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申请号: US11961195申请日: 2007-12-20
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公开(公告)号: US07643154B2公开(公告)日: 2010-01-05
- 发明人: Tsutomu Kikawa , Hiroaki Okada , Takefumi Hayashi , Hisashi Tsukada , Yasufumi Fukuma
- 申请人: Tsutomu Kikawa , Hiroaki Okada , Takefumi Hayashi , Hisashi Tsukada , Yasufumi Fukuma
- 申请人地址: JP Itabashi-ku
- 专利权人: Kabushiki Kaisha Topcon
- 当前专利权人: Kabushiki Kaisha Topcon
- 当前专利权人地址: JP Itabashi-ku
- 代理机构: Edwards Angell Palmer & Dodge LLP
- 优先权: JP2006-349880 20061226
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
An optical image measurement device comprises: a light source configured to emit a low-coherence light; an interference-light generator configured to generate an interference light, by splitting the low-coherence light into a signal light and a reference light, and superimposing the signal light passed through a measurement object and the reference light passed through a reference object; a changer configured to change a difference in optical path length; a detector configured to detect the interference light; an image forming part configured to form an image of the measurement object within a predetermined frame based on the result of the detection; an analyzer configured to analyze the image, and specify a position of the image within the frame; and a controller configured to control the changer based on the specified position to change the difference so that an image newly formed is placed in a predetermined position within the frame.
公开/授权文献
- US20080151256A1 OPTICAL IMAGE MEASUREMENT DEVICE 公开/授权日:2008-06-26
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