发明授权
- 专利标题： Method of manufacturing spacer
- 专利标题（中）： 垫片的制造方法
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申请号： US11694437申请日： 2007-03-30
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公开(公告)号： US07648924B2公开(公告)日： 2010-01-19
- 发明人: Kuo-Liang Wei
- 申请人： Kuo-Liang Wei
- 申请人地址： TW Hsinchu
- 专利权人： MACRONIX International Co., Ltd.
- 当前专利权人： MACRONIX International Co., Ltd.
- 当前专利权人地址： TW Hsinchu
- 代理机构： J.C. Patents
- 主分类号： H01L21/31
- IPC分类号： H01L21/31
摘要：
A method of manufacturing an L-shaped spacer is described. First, a substrate is provided and a protruding structure is formed thereon. Next, a dielectric material is formed on the substrate and covers the stacked structure. Then, the dielectric material on the top of the protruding structure and on portions of the substrate is removed to form an L-shaped spacer.
公开/授权文献
- US20080242092A1 METHOD OF MANUFACTURING SPACER 公开/授权日：2008-10-02
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