发明授权
- 专利标题: Method for forming strained silicon nitride films and a device containing such films
- 专利标题(中): 形成应变氮化硅膜的方法和含有这种膜的装置
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申请号: US11730288申请日: 2007-03-30
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公开(公告)号: US07651961B2公开(公告)日: 2010-01-26
- 发明人: Robert D. Clark
- 申请人: Robert D. Clark
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L21/31
- IPC分类号: H01L21/31 ; H01L21/469
摘要:
A method for forming a strained SiN film and a semiconductor device containing the strained SiN film. The method includes exposing the substrate to a gas including a silicon precursor, exposing the substrate to a gas containing a nitrogen precursor activated by a plasma source at a first level of plasma power and configured to react with the silicon precursor with a first reactivity characteristic, and exposing the substrate to a gas containing the nitrogen precursor activated by the plasma source at a second level of plasma power different from the first level and configured to react with the silicon precursor with a second reactivity characteristic such that a property of the silicon nitride film formed on the substrate changes to provide the strained silicon nitride film.