Invention Grant
- Patent Title: Yokeless hidden hinge digital micromirror device
- Patent Title (中): 无线隐形铰链数码微镜装置
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Application No.: US11834583Application Date: 2007-08-06
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Publication No.: US07654677B2Publication Date: 2010-02-02
- Inventor: Anthony DiCarlo , Patrick I. Oden , Richard L. Knipe , Rabah Mezenner , James D. Huffman
- Applicant: Anthony DiCarlo , Patrick I. Oden , Richard L. Knipe , Rabah Mezenner , James D. Huffman
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Charles A. Brill; Wade James Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B28/00

Abstract:
A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of three operating layers 12, 13, 14. An addressing layer 12 is fabricated on the substrate. A hinge layer 13 is spaced above the addressing layer 12 by an air gap. A mirror layer 14 is spaced over the hinge layer 13 by a second air gap. The hinge layer 13 has a hinge 13a under and attached to the mirror 14a, the hinge 13a permitting the mirror 14a to tilt. The hinge layer 13 further has spring tips 13c under the mirror 14a, which are attached to the addressing layer 12. These spring tips 13c provide a stationary landing surface for the mirror 14a.
Public/Granted literature
- US20070285757A1 Yokeless Hidden Hinge Digital Micromirror Device Public/Granted day:2007-12-13
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