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公开(公告)号：US07252395B2
公开(公告)日：2007-08-07
申请号：US11372686
申请日：2006-03-10
IPC分类号： G02B26/00
CPC分类号： B81B3/0035 , G02B26/0841 , Y10T428/22
摘要： A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.
摘要翻译： 制造在半导体衬底上的微镜阵列。 该阵列由三个操作层组成。 在衬底上制造寻址层。 铰链层通过气隙在寻址层上方间隔开。 镜层通过第二气隙在铰链层上间隔开。 铰链层具有在镜子下方并附接到铰链上的铰链，铰链允许镜子倾斜。 铰链层还具有在镜下的弹簧尖端，其附接到寻址层。 这些弹簧尖端为镜子提供了固定的着陆面。
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2.发明授权Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors 失效非接触式无源温度测量系统及使用微机械传感器的操作方法
公开(公告)号：US6050722A
公开(公告)日：2000-04-18
申请号：US47358
申请日：1998-03-25
IPC分类号： G01J5/20 , G01J5/40 , G01J5/44 , G01J5/60 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01J5/00 , G01B5/00 , G01N29/12
摘要： A non-contact infrared thermometer measures target temperatures remotely without requiring the ratio of the target size to the target distance to the thermometer. A collection means collects and focusses target IR radiation on an IR detector. The detector measures thermal energy of the target over a spectrum using micromechanical sensors. A processor means calculates the collected thermal energy in at least two different spectral regions using a first algorithm in program form and further calculates the ratio of the thermal energy in the at least two different spectral regions to obtain the target temperature independent of the target size, distance to the target and emissivity using a second algorithm in program form.
摘要翻译： 非接触式红外线温度计远程测量目标温度，而不需要目标尺寸与目标温度计距离的比例。 收集装置收集并集中在IR检测器上的目标IR辐射。 检测器使用微机械传感器测量目标在光谱上的热能。 处理器装置使用程序形式的第一算法在至少两个不同的光谱区域中计算所收集的热能，并且进一步计算至少两个不同光谱区域中的热能的比率以获得独立于目标大小的目标温度， 使用程序形式的第二个算法与目标的距离和发射率。
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公开(公告)号：US06436346B1
公开(公告)日：2002-08-20
申请号：US09395630
申请日：1999-09-14
申请人： Mitchel J. Doktycz , Charles L. Britton, Jr. , Stephen F. Smith , Patrick I. Oden , William L. Bryan , James A. Moore , Thomas G. Thundat , Robert J. Warmack
发明人： Mitchel J. Doktycz , Charles L. Britton, Jr. , Stephen F. Smith , Patrick I. Oden , William L. Bryan , James A. Moore , Thomas G. Thundat , Robert J. Warmack
IPC分类号： G01N2520
CPC分类号： G01K17/006
摘要： A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.
摘要翻译： 提供了一种用于检测和监测由分子反应引起的微量焓变的方法和装置。 微加工技术用于创建非常小的热隔离块，并结合温度敏感电路。 热隔离的质量块设置有分子层或涂层，并且当涂层的分子参与焓反应时，温度敏感电路提供指示。 可以单独地或以阵列形式提供热分离的质量，并且在后一种情况下，分子涂层可以不同以提供物质的定性和/或定量测定。
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公开(公告)号：US07654677B2
公开(公告)日：2010-02-02
申请号：US11834583
申请日：2007-08-06
CPC分类号： B81B3/0035 , G02B26/0841 , Y10T428/22
摘要： A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of three operating layers 12, 13, 14. An addressing layer 12 is fabricated on the substrate. A hinge layer 13 is spaced above the addressing layer 12 by an air gap. A mirror layer 14 is spaced over the hinge layer 13 by a second air gap. The hinge layer 13 has a hinge 13a under and attached to the mirror 14a, the hinge 13a permitting the mirror 14a to tilt. The hinge layer 13 further has spring tips 13c under the mirror 14a, which are attached to the addressing layer 12. These spring tips 13c provide a stationary landing surface for the mirror 14a.
摘要翻译： 制造在半导体衬底11上的微镜阵列110.阵列110由三个工作层12,13,14组成。寻址层12被制造在衬底上。 铰链层13通过气隙在寻址层12上方间隔开。 镜层14通过第二气隙在铰链层13上间隔开。 铰链层13在反射镜14a的下方并具有铰链13a，铰链13a允许反射镜14a倾斜。 铰链层13还具有安装在寻址层12下方的反射镜14a下面的弹簧尖端13c。这些弹簧顶端13c为反射镜14a提供固定的着陆面。
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公开(公告)号：US07011415B2
公开(公告)日：2006-03-14
申请号：US10298423
申请日：2002-11-18
IPC分类号： G02B26/00
CPC分类号： B81B3/0035 , G02B26/0841 , Y10T428/22
摘要： A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.
摘要翻译： 制造在半导体衬底上的微镜阵列。 该阵列由三个操作层组成。 在衬底上制造寻址层。 铰链层通过气隙在寻址层上方间隔开。 镜层通过第二气隙在铰链层上间隔开。 铰链层具有在镜子下方并附接到铰链上的铰链，铰链允许镜子倾斜。 铰链层还具有在镜下的弹簧尖端，其附接到寻址层。 这些弹簧尖端为镜子提供了固定的着陆面。
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6.发明授权Micromechanical transient sensor for measuring viscosity and density of a fluid 失效用于测量流体的粘度和密度的微机械瞬态传感器公开(公告)号：US06311549B1
公开(公告)日：2001-11-06
申请号：US09401865
申请日：1999-09-23
IPC分类号： G01N1110
CPC分类号： G01N29/022 , G01N9/002 , G01N11/16 , G01N29/30 , G01N29/343 , G01N29/46 , G01N2009/006 , G01N2291/0256 , G01N2291/02818 , G01N2291/0427
摘要： A method and apparatus for measuring the viscosity and/or specific density of a fluid utilizes a microcantilever vibrated in the analyte fluid. The source of vibration is switched on and off and the transient behavior or decay in amplitude of the vibration is monitored. The method is particularly useful for the measurement of process conditions in remote locations in real time.
摘要翻译： 用于测量流体的粘度和/或比重密度的方法和装置利用在分析物流体中振动的微悬臂梁。 振动源开启和关闭，并监测振动振幅的瞬态特性或衰减。 该方法对于实时测量偏远地区的工艺条件特别有用。
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