Invention Grant
US07655520B2 Non-volatile memory having three states and method for manufacturing the same 失效
具有三种状态的非易失性存储器及其制造方法

  • Patent Title: Non-volatile memory having three states and method for manufacturing the same
  • Patent Title (中): 具有三种状态的非易失性存储器及其制造方法
  • Application No.: US11852415
    Application Date: 2007-09-10
  • Publication No.: US07655520B2
    Publication Date: 2010-02-02
  • Inventor: Kyung Do Kim
  • Applicant: Kyung Do Kim
  • Applicant Address: KR Kyoungki-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Kyoungki-do
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2005-0021388 20050315
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Non-volatile memory having three states and method for manufacturing the same
Abstract:
Disclosed is a non-volatile memory having three data states and a method for manufacturing the same. The non-volatile memory includes a silicon substrate having a device separation film; a floating gate formed on the silicon substrate; a tunnel oxide film interposed between the silicon substrate and the floating gate below both ends of the floating gate; a ferroelectric substance interposed between the silicon substrate and the floating gate inside the tunnel oxide film; a diffusion barrier film enclosing the ferroelectric substance; a control gate formed on the substrate including the floating gate; a gate oxide film formed below the control gate; spacers formed on both lateral walls of the laminated floating gate and control gate including the tunnel oxide film and gate oxide film, respectively; and source/drain regions formed within the substrate surfaces on both sides of the control gate including the spacers, respectively.
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