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US07656000B2 Photodetector for backside-illuminated sensor 有权
背面照明传感器的光电探测器

Photodetector for backside-illuminated sensor
Abstract:
A backside-illuminated sensor including a semiconductor substrate. The semiconductor substrate has a front surface and a back surface. A plurality of pixels are formed on the front surface of the semiconductor substrate. At least one pixel includes a photogate structure. The photogate structure has a gate that includes a reflective layer.
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