发明授权
- 专利标题: Substrate storage container
- 专利标题(中): 基材储存容器
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申请号: US12034040申请日: 2008-02-20
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公开(公告)号: US07658290B2公开(公告)日: 2010-02-09
- 发明人: Atsushi Sumi , Junya Toda , Takayuki Nakayama
- 申请人: Atsushi Sumi , Junya Toda , Takayuki Nakayama
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Darby & Darby P.C.
- 优先权: JP2002-311275 20021025; JP2002-344954 20021128
- 主分类号: B65D51/16
- IPC分类号: B65D51/16 ; B65D85/30 ; H01L21/02
摘要:
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
公开/授权文献
- US20080149528A1 SUBSTRATE STORAGE CONTAINER 公开/授权日:2008-06-26
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