公开(公告)号：US06504485B2

公开(公告)日：2003-01-07

申请号：US09756267

申请日：2001-01-09

申请人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

发明人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

IPC分类号： G08B2100

CPC分类号： G08G1/097

摘要： Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

摘要翻译： 用于在多个道路相交的十字路口等处提供的交通信号灯的正常操作的故障安全监视监视和控制装置。 使用传感器装置检测各信号灯的照明条件，当照明或非照明信号灯的数量为预定数量时，产生与高能量条件对应的逻辑值1的正常判断输出，而当 照明信号灯或非照明信号灯的数量不是预定数量，产生对应于低能量条件的逻辑值0的异常判断输出。 结果，当监视装置中的故障停止输出时，由此产生的输出条件与由于信号光异常引起的危险状况相同，导致极其安全的信号灯监视和控制，具有优良的故障安全特性 。

公开(公告)号：US06184799B2

公开(公告)日：2001-02-06

申请号：US08750771

申请日：1996-12-17

申请人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

发明人： Yoshitaka Jinno ,  Yoshiharu Ozaki ,  Norihiro Okada ,  Heisaku Mazawa ,  Hidetoshi Fujimoto ,  Junya Toda ,  Koichi Futsuhara ,  Norihiro Asada

IPC分类号： G08G1095

CPC分类号： G08G1/097

摘要： Monitoring and control apparatus for fail-safe monitoring for normal operation of traffic signal lights provided at an intersection or the like where a plurality of roads intersect. The illumination conditions of respective signal lights are detected using as sensor device, and when the number of illuminated or non-illuminated signal lights is a predetermined number, a normal judgment output of logic value 1 corresponding to a high energy condition is generated while, when the number of illuminated or non-illuminated signal lights is not the predetermined number, an abnormal judgment output of logic value 0 corresponding to a low energy condition is generated. As a result, when a fault in the monitoring apparatus stops the output, the resultant output condition is the same as for a danger condition due to a signal light abnormality, resulting in an extremely safe signal light monitoring and control with excellent fail-safe characteristics.

摘要翻译： 用于在多个道路相交的十字路口等处提供的交通信号灯的正常操作的故障安全监视监视和控制装置。 使用传感器装置检测各信号灯的照明条件，当照明或非照明信号灯的数量为预定数量时，产生与高能量条件对应的逻辑值1的正常判断输出，而当 照明信号灯或非照明信号灯的数量不是预定数量，产生对应于低能量条件的逻辑值0的异常判断输出。 结果，当监视装置中的故障停止输出时，由此产生的输出条件与由于信号光异常引起的危险状况相同，导致极其安全的信号灯监视和控制，具有优良的故障安全特性 。

公开(公告)号：US07658289B2

公开(公告)日：2010-02-09

申请号：US12021719

申请日：2008-01-29

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D51/16 ,  B65D85/30 ,  H01L21/02

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

公开(公告)号：US07455180B2

公开(公告)日：2008-11-25

申请号：US10496932

申请日：2003-10-01

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/30

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US20080149527A1

公开(公告)日：2008-06-26

申请号：US12021719

申请日：2008-01-29

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/00

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accomodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 衬底存储容器包括用于容纳半导体晶片的容纳主体和对准容器主体前部的门，以及设置在容器本体底部以控制气体流动的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US08091710B2

公开(公告)日：2012-01-10

申请号：US12444545

申请日：2007-09-28

申请人： Akihiro Hasegawa ,  Junya Toda

发明人： Akihiro Hasegawa ,  Junya Toda

IPC分类号： B65D85/48

CPC分类号： B65D55/14 ,  B65D2585/86 ,  H01L21/67373

摘要： A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator.

摘要翻译： 可拆卸地装配在用于存储基板的容器主体的开口部分中的门结构包括：装配到容器主体的开口部的壳体;设置在壳体中的锁定机构，用于通过使卡合件 基于旋转体的旋转以可缩回的方式从壳体的周壁突出，以便与容器主体的开口部分的内周相交，用于封闭锁定机构的盖和形成在 盖子以反对旋转体。

公开(公告)号：US20100032339A1

公开(公告)日：2010-02-11

申请号：US12444545

申请日：2007-09-28

申请人： Akihiro Hasegawa ,  Junya Toda

发明人： Akihiro Hasegawa ,  Junya Toda

IPC分类号： H01L21/673 ,  B65D85/86 ,  A47B96/00

CPC分类号： B65D55/14 ,  B65D2585/86 ,  H01L21/67373

摘要： A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator.

摘要翻译： 可拆卸地装配在用于存储基板的容器主体的开口部分中的门结构包括：装配到容器主体的开口部的壳体;设置在壳体中的锁定机构，用于通过使卡合件 基于旋转体的旋转以可缩回的方式从壳体的周壁突出，以便与容器主体的开口部分的内周相交，用于封闭锁定机构的盖和形成在 盖子以反对旋转体。

公开(公告)号：US20070187287A1

公开(公告)日：2007-08-16

申请号：US10592043

申请日：2005-03-09

申请人： Junya Toda ,  Takayuki Nakayama

发明人： Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/00

CPC分类号： H01L21/67386 ,  F16B35/06 ,  F16B39/24 ,  F16B39/282

摘要： A substrate storage container is provided which can convey, fix and store substrates safely, with threaded members not being loosened by a load applied to a mounting member of the substrate storage container when the container storing substrates is conveyed or when the container is fixed to a substrate processing apparatus and by a heating process at the time of washing and drying of the container. For fastening the mounting member (6), such as a side plate for conveyance, a bottom plate for positioning the container with respect to a substrate processing apparatus, etc., to the substrate storage container including a container body (1) and a lid (2) by threaded members (3), a locking means for preventing loosening of the threaded members (3) is interposed between engagement surfaces of each threaded member (3) and the mounting member (6).

摘要翻译： 提供了能够安全地输送，固定和存储基板的基板存储容器，当输送容器储存基板时，或者当容器固定到基板存储容器时，螺纹构件不被施加到基板存储容器的安装构件的载荷松动 基板处理装置以及洗涤和干燥容器时的加热处理。 为了将诸如用于输送的侧板的安装构件（6）紧固到用于将容器相对于基板处理装置等定位的底板到包括容器主体（1）和盖的基板存储容器 （2）通过螺纹构件（3），用于防止螺纹构件（3）松动的锁定装置插入在每个螺纹构件（3）和安装构件（6）的接合表面之间。

公开(公告)号：US20050077204A1

公开(公告)日：2005-04-14

申请号：US10496932

申请日：2003-10-01

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： F16K15/02 ,  H01L21/00 ,  H01L21/673 ,  B65D85/30

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US07658290B2

公开(公告)日：2010-02-09

申请号：US12034040

申请日：2008-02-20

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D51/16 ,  B65D85/30 ,  H01L21/02

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。