发明授权
US07659591B2 Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid
有权
具有被配置为具有能够容纳液体的内部的储存器的材料层的装置
- 专利标题: Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid
- 专利标题(中): 具有被配置为具有能够容纳液体的内部的储存器的材料层的装置
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申请号: US12199236申请日: 2008-08-27
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公开(公告)号: US07659591B2公开(公告)日: 2010-02-09
- 发明人: Vladimir A. Aksyuk , Nagesh R. Basavanhally , Omar D. Lopez , Chien-Shing Pai
- 申请人: Vladimir A. Aksyuk , Nagesh R. Basavanhally , Omar D. Lopez , Chien-Shing Pai
- 申请人地址: US NJ Murray Hill
- 专利权人: Alcatel-Lucent USA Inc.
- 当前专利权人: Alcatel-Lucent USA Inc.
- 当前专利权人地址: US NJ Murray Hill
- 代理机构: Hitt Gaines, PC
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
The present invention provides an apparatus. The apparatus, in one embodiment, includes an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.
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