发明授权
US07663319B2 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities 有权
用于产生具有离子化不稳定性的强电离等离子体的方法和装置

Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
摘要:
A strongly-ionized plasma generator includes a chamber for confining a feed gas. An anode is positioned inside the chamber. A cathode assembly is positioned adjacent to the anode inside the chamber. An output of a pulsed power supply is electrically connected between the anode and the cathode assembly. The pulsed power supply comprising solid state switches that are controlled by micropulses generated by drivers. At least one of a pulse width and a duty cycle of the micropulses is varied so that the power supply generates a multi-step voltage waveform at the output having a low-power stage including a peak voltage and a rise time that is sufficient to generate a plasma from the feed gas and a transient stage including a peak voltage and a rise time that is sufficient to generate a more strongly-ionized plasma.
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