发明授权
US07663319B2 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
有权
用于产生具有离子化不稳定性的强电离等离子体的方法和装置
- 专利标题: Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
- 专利标题(中): 用于产生具有离子化不稳定性的强电离等离子体的方法和装置
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申请号: US11738491申请日: 2007-04-22
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公开(公告)号: US07663319B2公开(公告)日: 2010-02-16
- 发明人: Roman Chistyakov , Bassam Hanna Abraham
- 申请人: Roman Chistyakov , Bassam Hanna Abraham
- 申请人地址: US MA Mansfield
- 专利权人: Zond, Inc.
- 当前专利权人: Zond, Inc.
- 当前专利权人地址: US MA Mansfield
- 代理机构: Rauschenbach Patent Law Group, LLC
- 代理商 Kurt Rauschenbach
- 主分类号: H01J7/24
- IPC分类号: H01J7/24
摘要:
A strongly-ionized plasma generator includes a chamber for confining a feed gas. An anode is positioned inside the chamber. A cathode assembly is positioned adjacent to the anode inside the chamber. An output of a pulsed power supply is electrically connected between the anode and the cathode assembly. The pulsed power supply comprising solid state switches that are controlled by micropulses generated by drivers. At least one of a pulse width and a duty cycle of the micropulses is varied so that the power supply generates a multi-step voltage waveform at the output having a low-power stage including a peak voltage and a rise time that is sufficient to generate a plasma from the feed gas and a transient stage including a peak voltage and a rise time that is sufficient to generate a more strongly-ionized plasma.
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