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US07663456B2 Micro-electromechanical system (MEMS) switch arrays 有权
微机电系统(MEMS)开关阵列

Micro-electromechanical system (MEMS) switch arrays
Abstract:
A micro-electromechanical system (MEMS) switch array for power switching includes an input node, an output node, and a plurality of MEMS switches, wherein the input node and the output node are independently in electrical communication with a portion of the plurality of MEMS switches, and wherein a failure of any one of the plurality of MEMS switches does not render ineffective another MEMS switch within the MEMS switch array.
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