Invention Grant
- Patent Title: Automatic defect review and classification system
- Patent Title (中): 自动缺陷审查和分类系统
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Application No.: US11451330Application Date: 2006-06-13
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Publication No.: US07664562B2Publication Date: 2010-02-16
- Inventor: Takehiro Hirai , Kazuo Aoki , Kenji Obara
- Applicant: Takehiro Hirai , Kazuo Aoki , Kenji Obara
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2005-172808 20050613
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
Public/Granted literature
- US20060282190A1 Automatic defect review and classification system Public/Granted day:2006-12-14
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