Invention Grant
- Patent Title: Transfer chamber for flat display device manufacturing apparatus
- Patent Title (中): 平板显示装置制造装置用转印室
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Application No.: US10978967Application Date: 2004-11-01
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Publication No.: US07665946B2Publication Date: 2010-02-23
- Inventor: Gwang Ho Hur , Jun Young Choi , Sang Baek Lee , Cheol Won Lee
- Applicant: Gwang Ho Hur , Jun Young Choi , Sang Baek Lee , Cheol Won Lee
- Applicant Address: KR Kyunggi-do
- Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee Address: KR Kyunggi-do
- Agency: KED & Associates, LLP
- Priority: KR10-2003-0077631 20031104; KR10-2003-0077633 20031104; KR10-2003-0080413 20031114
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.
Public/Granted literature
- US20050095089A1 Transfer chamber for flat display device manufacturing apparatus Public/Granted day:2005-05-05
Information query
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