发明授权
- 专利标题: Semiconductor nonvolatile storage element and method of fabricating the same
- 专利标题(中): 半导体非易失性存储元件及其制造方法
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申请号: US11634042申请日: 2006-12-05
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公开(公告)号: US07667252B2公开(公告)日: 2010-02-23
- 发明人: Shigeki Sakai , Kazuo Sakamaki
- 申请人: Shigeki Sakai , Kazuo Sakamaki
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: National Institute of Advanced Industrial Science and Technology,SEIKO NPC Corporation
- 当前专利权人: National Institute of Advanced Industrial Science and Technology,SEIKO NPC Corporation
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Jordan and Hamburg LLP
- 优先权: JP2001-90509 20010327
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
To provide a semiconductor nonvolatile storage device capable of applying distributed voltage efficiently to a ferroelectric capacitor in a semiconductor nonvolatile storage device having an MFMIS structure without enlarging a memory cell area and a method of fabricating the same, a ferroelectric nonvolatile storage element is constructed by a structure successively laminated with a first insulator layer (3), a first conductor layer (4), a ferroelectric layer (5) and a second conductor layer (6) on a channel region and is constructed by a structure having a third conductor (9) and a fourth conductor (10) respectively laminated on a source region and a drain region, in which the third conductor (9) and the fourth conductor (10) are opposed to each other via the first conductor layer (4) and a second insulator thin film (11).
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