发明授权
- 专利标题: Semiconductor processing methods, and methods of forming flash memory structures
- 专利标题(中): 半导体处理方法和形成闪存结构的方法
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申请号: US11851484申请日: 2007-09-07
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公开(公告)号: US07670905B2公开(公告)日: 2010-03-02
- 发明人: Mark Kiehlbauch
- 申请人: Mark Kiehlbauch
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Some embodiments include methods of reflecting ions off of vertical regions of photoresist mask sidewalls such that the ions impact foot regions along the bottom of the photoresist mask sidewalls and remove at least the majority of the foot regions. In some embodiments, trenches may be formed adjacent the photoresist mask sidewalls in a material that is beneath the photoresist mask. Another material may be formed to have projections extending into the trenches. Such projections may assist in anchoring said other material to the material that is beneath the photoresist mask. In some embodiments, the photoresist mask is utilized for patterning flash memory structures. Some embodiments include semiconductor constructions having materials anchored to underlying materials through fang-like projections.
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