发明授权
- 专利标题: Apparatus for observing a sample with a particle beam and an optical microscope
- 专利标题(中): 用粒子束和光学显微镜观察样品的装置
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申请号: US12026419申请日: 2008-02-05
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公开(公告)号: US07671333B2公开(公告)日: 2010-03-02
- 发明人: Alexandra Valerievna Agronskaja , Hans Casper Gerritsen , Adrianus Johannes Verkleij , Abraham Johannes Koster
- 申请人: Alexandra Valerievna Agronskaja , Hans Casper Gerritsen , Adrianus Johannes Verkleij , Abraham Johannes Koster
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Scheinberg & Griner, LLP
- 代理商 Michael O. Scheinberg; David Griner
- 优先权: EP07101725 20070205
- 主分类号: G01N13/12
- IPC分类号: G01N13/12 ; H01J37/20 ; H01J37/28 ; H01J37/244
摘要:
An apparatus for observing a sample (1) with a TEM column and an optical high resolution scanning microscope (10). The sample position when observing the sample with the TEM column differs from the sample position when observing the sample with the optical microscope in that in the latter case the sample is tilted towards the light-optical microscope. By using an optical microscope of the scanning type, and preferably using monochromatic light, the lens elements (11) of the optical microscope facing the sample position can be sufficiently small to be positioned between the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This is in contrast with the objective lens systems conventionally used in optical microscopes, which show a large diameter. Furthermore the optical microscope, or at least the parts (11) close to the sample, may be retractable so as to free space when imaging in TEM mode.
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