Invention Grant
- Patent Title: Silicide strapping in imager transfer gate device
- Patent Title (中): 成像器中的硅化物贴带传输门装置
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Application No.: US11565801Application Date: 2006-12-01
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Publication No.: US07675097B2Publication Date: 2010-03-09
- Inventor: James W. Adkisson , John J. Ellis-Monaghan , R. Michael Guidash , Mark D. Jaffe , Edward T. Nelson , Richard J. Rassel , Charles V. Stancampiano
- Applicant: James W. Adkisson , John J. Ellis-Monaghan , R. Michael Guidash , Mark D. Jaffe , Edward T. Nelson , Richard J. Rassel , Charles V. Stancampiano
- Applicant Address: US NY Armonk US NY Rochester
- Assignee: International Business Machines Corporation,Eastman Kodak Company
- Current Assignee: International Business Machines Corporation,Eastman Kodak Company
- Current Assignee Address: US NY Armonk US NY Rochester
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A CMOS active pixel sensor (APS) cell structure having dual workfunction transfer gate device and method of fabrication. The transfer gate device comprises a dielectric layer formed on a substrate and a dual workfunction gate conductor layer formed on the dielectric layer comprising a first conductivity type doped region and an abutting second conductivity type doped region. The transfer gate device defines a channel region where charge accumulated by a photosensing device is transferred to a diffusion region. A silicide structure is formed atop the dual workfunction gate conductor layer for electrically coupling the first and second conductivity type doped regions. In one embodiment, the silicide contact is smaller in area dimension than an area dimension of said dual workfunction gate conductor layer. Presence of the silicide strap prevents the diodic behavior from allowing one or the other side of the gate to float to an indeterminate voltage.
Public/Granted literature
- US20080128767A1 SILICIDE STRAPPING IN IMAGER TRANSFER GATE DEVICE Public/Granted day:2008-06-05
Information query
IPC分类: