发明授权
US07675179B2 Device and method to eliminate shorting induced by via to metal misalignment 有权
消除由通孔到金属不对准引起的短路的装置和方法

Device and method to eliminate shorting induced by via to metal misalignment
摘要:
The present invention provides an interconnect that can be employed in an integrated circuit. The interconnect includes a metal line located over a substrate, a dielectric layer located over the metal line, and an interconnect located in the dielectric layer, including a landed portion located over the metal line and an unlanded portion located along at least a portion of a lateral edge of the metal line. The unlanded portion is at least partially filled with a polymer, and the landed portion is substantially filled with a conductive material. A method for manufacturing the interconnect is also provided.
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