Invention Grant
- Patent Title: Micro electro mechanical systems device
- Patent Title (中): 微机电系统装置
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Application No.: US12215401Application Date: 2008-06-27
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Publication No.: US07675671B2Publication Date: 2010-03-09
- Inventor: Yasuhiro Ohmori
- Applicant: Yasuhiro Ohmori
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2007-173188 20070629
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/12
Abstract:
An aspect of the embodiment, a MEMS device includes a rotating unit, a first hinge, a first frame and an actuator. The actuator has a plurality of electrodes for rotating the rotating unit. The first frame has one of the electrodes. A portion of silicon layer by the electrode of the frame is chamfered.
Public/Granted literature
- US20090002798A1 Micro Electro Mechanical Systems device Public/Granted day:2009-01-01
Information query
