发明授权
US07676775B2 Method to determine the root causes of failure patterns by using spatial correlation of tester data
失效
通过使用测试仪数据的空间相关性确定故障模式的根本原因的方法
- 专利标题: Method to determine the root causes of failure patterns by using spatial correlation of tester data
- 专利标题(中): 通过使用测试仪数据的空间相关性确定故障模式的根本原因的方法
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申请号: US11754947申请日: 2007-05-29
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公开(公告)号: US07676775B2公开(公告)日: 2010-03-09
- 发明人: Howard Chen , Katherine V. Hawkins , Fook-Luen Heng , Louis Hsu , Xu Ouyang
- 申请人: Howard Chen , Katherine V. Hawkins , Fook-Luen Heng , Louis Hsu , Xu Ouyang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: August Law, LLC
- 代理商 George Willinghan
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method for determining the root causes of fail patterns in integrated circuit chips is provide wherein a known integrated circuit chip layout is used to identify a plurality of potential defects and a plurality of potential fail patterns in the integrated circuit chip. Correlations between the potential defects and the potential fail patterns that result from those defects are identified. Based on this identification, the potential fail patterns are grouped by common potential defect. An actual integrated circuit chip that is manufactured in accordance with the test layout is tested for failure patterns. These failure patterns are then compared to the groupings of potential fail patterns. When a match is found, that is when a given group of fail patterns is found in the actual integrated circuit chip, then the potential defect associated with the potential fail patterns to which the actual fail patterns are matched is identified. This defect is the root cause of the failure pattern in the actual chip.
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