发明授权
- 专利标题: Arc chamber for an ion implantation system
- 专利标题(中): 用于离子注入系统的电弧室
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申请号: US11772822申请日: 2007-07-02
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公开(公告)号: US07679070B2公开(公告)日: 2010-03-16
- 发明人: Jung-Chi Chen
- 申请人: Jung-Chi Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: United Microelectronics Corp.
- 当前专利权人: United Microelectronics Corp.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/08 ; H01J27/08
摘要:
An arc chamber for an ion implantation system includes an exit aperture positioned at a wall of the arc chamber, filaments respectively positioned at two opposing sides within the arc chamber, and repeller structures respectively positioned at two opposing walls within the arc chamber between the filaments and the arc chamber. The repeller structure includes a repeller substrate with a screw axis for fitting the repeller structure to the arc chamber, an insulator positioned underneath the repeller substrate providing an electrical isolation between the repeller substrate and the arc chamber, and a conductive spacer covering a portion of the insulator positioned in between the insulator and the arc chamber.
公开/授权文献
- US20090008570A1 ARC CHAMBER FOR AN ION IMPLANTATION SYSTEM 公开/授权日:2009-01-08
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