Invention Grant
US07679085B2 Display device, method for fabricating thin film transistor and method for fabricating thin film transistor array substrate using the said method
有权
显示装置,薄膜晶体管的制造方法以及使用该方法制造薄膜晶体管阵列基板的方法
- Patent Title: Display device, method for fabricating thin film transistor and method for fabricating thin film transistor array substrate using the said method
- Patent Title (中): 显示装置,薄膜晶体管的制造方法以及使用该方法制造薄膜晶体管阵列基板的方法
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Application No.: US11646241Application Date: 2006-12-28
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Publication No.: US07679085B2Publication Date: 2010-03-16
- Inventor: Woong Gi Jun , Gee Sung Chae , Jae Seok Heo
- Applicant: Woong Gi Jun , Gee Sung Chae , Jae Seok Heo
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2006-0061432 20060630
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L35/24

Abstract:
A method for fabricating a thin film transistor (TFT) on a substrate includes forming a gate electrode; forming a semiconductor layer being insulated from the gate electrode and partially overlapped with the gate electrode; sequentially forming first and second gate insulating layers between the gate electrode and the semiconductor layer, wherein the first gate insulating layer is formed of a material different from the second gate insulating layer and at least one of the first and second gate insulating layers includes a sol-compound; and forming source and drain electrodes at both sides of the semiconductor layer.
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