发明授权
US07679085B2 Display device, method for fabricating thin film transistor and method for fabricating thin film transistor array substrate using the said method 有权
显示装置,薄膜​​晶体管的制造方法以及使用该方法制造薄膜晶体管阵列基板的方法

Display device, method for fabricating thin film transistor and method for fabricating thin film transistor array substrate using the said method
摘要:
A method for fabricating a thin film transistor (TFT) on a substrate includes forming a gate electrode; forming a semiconductor layer being insulated from the gate electrode and partially overlapped with the gate electrode; sequentially forming first and second gate insulating layers between the gate electrode and the semiconductor layer, wherein the first gate insulating layer is formed of a material different from the second gate insulating layer and at least one of the first and second gate insulating layers includes a sol-compound; and forming source and drain electrodes at both sides of the semiconductor layer.
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