Invention Grant
- Patent Title: High performance catadioptric imaging system
- Patent Title (中): 高性能反射折射成像系统
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Application No.: US11543519Application Date: 2006-10-04
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Publication No.: US07679842B2Publication Date: 2010-03-16
- Inventor: David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
- Applicant: David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corporation
- Current Assignee: KLA-Tencor Technologies Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Smyrski Law Group. A P.C.
- Main IPC: G02B9/00
- IPC: G02B9/00

Abstract:
A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
Public/Granted literature
- US20070024961A1 High performance catadioptric imaging system Public/Granted day:2007-02-01
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