发明授权
- 专利标题: Method of designing and manufacturing semiconductor device
- 专利标题(中): 半导体器件的设计和制造方法
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申请号: US11858551申请日: 2007-09-20
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公开(公告)号: US07681155B2公开(公告)日: 2010-03-16
- 发明人: Shigeyuki Takagi , Shigeru Kinoshita , Hiroshi Watanabe , Toshitake Yaegashi
- 申请人: Shigeyuki Takagi , Shigeru Kinoshita , Hiroshi Watanabe , Toshitake Yaegashi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2007-084989 20070328
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A semiconductor device designing method includes calculating capacitance. The semiconductor device has a semiconductor substrate, an insulator formed on the semiconductor substrate, and an electrode formed on the insulator. The capacitance is calculated under an approximation assuming a portion of the semiconductor substrate, the insulator and a portion of the electrode to be one of a conductor and a dielectric depending on electric characteristics thereof, respectively.
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