发明授权
US07682846B2 Single and double-gate pseudo-FET devices for semiconductor materials evaluation
失效
用于半导体材料评估的单栅极和双栅极伪FET器件
- 专利标题: Single and double-gate pseudo-FET devices for semiconductor materials evaluation
- 专利标题(中): 用于半导体材料评估的单栅极和双栅极伪FET器件
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申请号: US12169190申请日: 2008-07-08
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公开(公告)号: US07682846B2公开(公告)日: 2010-03-23
- 发明人: Harold J. Hovel , Thermon E. McKoy
- 申请人: Harold J. Hovel , Thermon E. McKoy
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Louis J. Percello, Esq.
- 主分类号: H01L21/36
- IPC分类号: H01L21/36
摘要:
Several methods and structures are disclosed for determining electrical properties of silicon-on-insulator (SOI) wafers and alternate versions of such wafers such as strained silicon:silicon/germanium:-on-insulator (SSGOI) wafers. The analyzed electrical properties include mobilities, interface state densities, and oxide charge by depositing electrodes on the wafer surface and measuring the current-voltage behavior using these electrodes. In a single gate structure, the source and drain electrodes reside on the wafer surface and the buried insulator acts as the gate oxide, with the substrate acting as the gate electrode. In a double gate structure, an oxide is used on the upper surface between the source and drain electrodes and an additional metal layer is used on top of this oxide to act as a second gate electrode. Light of broad spectrum or specific wavelength may be used to alter electrical carrier densities in the region between the electrodes to further analyze the electrical properties of the material, or alternatively, the device can be used as a detector of light having a wavelength shorter than the bandgap wavelength of the Si surface.
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