发明授权
- 专利标题： Three-dimensional metal microfabrication process and devices produced thereby
- 专利标题（中）： 三维金属微细加工工艺及其制造的装置
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申请号： US11445067申请日： 2006-06-01
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公开(公告)号： US07682956B2公开(公告)日： 2010-03-23
- 发明人: Masaru P. Rao , Marco F. Aimi , Noel C. MacDonald
- 申请人： Masaru P. Rao , Marco F. Aimi , Noel C. MacDonald
- 申请人地址： US CA Oakland
- 专利权人： The Regents of the University of California
- 当前专利权人： The Regents of the University of California
- 当前专利权人地址： US CA Oakland
- 代理机构： Gates & Cooper LLP
- 主分类号： H01L21/3205
- IPC分类号： H01L21/3205 ; H01L21/4763
摘要：
The present invention relates, in general, to a method for three-dimensional (3D) microfabrication of complex, high aspect ratio structures with arbitrary surface height profiles in metallic materials, and to devices fabricated in accordance with this process. The method builds upon anisotropic deep etching methods for metallic materials previously developed by the inventors by enabling simplified realization of complex, non-prismatic structural geometries composed of multiple height levels and sloping and/or non-planar surface profiles. The utility of this approach is demonstrated in the fabrication of a sloping electrode structure intended for application in bulk micromachined titanium micromirror devices, however such a method could find use in the fabrication of any number of other microactuator, microsensor, microtransducer, or microstructure devices as well.
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