公开(公告)号：US07682956B2

公开(公告)日：2010-03-23

申请号：US11445067

申请日：2006-06-01

申请人： Masaru P. Rao ,  Marco F. Aimi ,  Noel C. MacDonald

发明人： Masaru P. Rao ,  Marco F. Aimi ,  Noel C. MacDonald

IPC分类号： H01L21/3205 ,  H01L21/4763

CPC分类号： C23F4/00 ,  B81B2201/042 ,  B81B2203/033 ,  B81C1/00126 ,  B81C2201/0132 ,  Y10T29/49117

摘要： The present invention relates, in general, to a method for three-dimensional (3D) microfabrication of complex, high aspect ratio structures with arbitrary surface height profiles in metallic materials, and to devices fabricated in accordance with this process. The method builds upon anisotropic deep etching methods for metallic materials previously developed by the inventors by enabling simplified realization of complex, non-prismatic structural geometries composed of multiple height levels and sloping and/or non-planar surface profiles. The utility of this approach is demonstrated in the fabrication of a sloping electrode structure intended for application in bulk micromachined titanium micromirror devices, however such a method could find use in the fabrication of any number of other microactuator, microsensor, microtransducer, or microstructure devices as well.

摘要翻译： 本发明一般涉及用于金属材料中具有任意表面高度分布的复合高纵横比结构的三维（3D）微细加工方法，以及根据该方法制造的器件。 该方法基于由本发明人先前开发的金属材料的各向异性深蚀刻方法，其通过使得能够简化实现由多个高度级别和倾斜和/或非平面表面轮廓组成的复杂的非棱柱结构几何形状。 在制造用于体积微加工的钛微镜器件中的倾斜电极结构的过程中证明了这种方法的实用性，然而这种方法可用于制造任何数量的其它微型致动器，微传感器，微传感器或微结构器件，如 好。