Invention Grant
US07686588B2 Liquid chemical supply system having a plurality of pressure detectors
有权
具有多个压力检测器的液体化学物质供应系统
- Patent Title: Liquid chemical supply system having a plurality of pressure detectors
- Patent Title (中): 具有多个压力检测器的液体化学物质供应系统
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Application No.: US11581464Application Date: 2006-10-17
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Publication No.: US07686588B2Publication Date: 2010-03-30
- Inventor: Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
- Applicant: Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
- Applicant Address: JP Tokyo JP Aichi
- Assignee: OCTEC Inc.,CKD Corporation
- Current Assignee: OCTEC Inc.,CKD Corporation
- Current Assignee Address: JP Tokyo JP Aichi
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-301439 20051017
- Main IPC: F04B49/22
- IPC: F04B49/22

Abstract:
A liquid chemical supply system that performs accurate pressure feedback control and controls the discharge flow rate of liquid chemical with high precision, even when the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, includes a pump having a pump chamber and an operation chamber separated by a diaphragm comprised of a flexible membrane. The intake and discharge of liquid chemical is performed in accordance with the change in pressure inside the operation chamber. An electro-pneumatic regulator supplies operation gas pressure to the operation chamber. A plurality of pressure sensors having different pressure detection ranges is provided for detecting the operation gas pressure. A controller selectively employs any of the detection results of the plurality of sensors in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.
Public/Granted literature
- US20070122291A1 Liquid chemical supply system having a plurality of pressure detectors Public/Granted day:2007-05-31
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