公开(公告)号：US07686588B2

公开(公告)日：2010-03-30

申请号：US11581464

申请日：2006-10-17

申请人： Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

发明人： Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

IPC分类号： F04B49/22

CPC分类号： F04B49/08

摘要： A liquid chemical supply system that performs accurate pressure feedback control and controls the discharge flow rate of liquid chemical with high precision, even when the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, includes a pump having a pump chamber and an operation chamber separated by a diaphragm comprised of a flexible membrane. The intake and discharge of liquid chemical is performed in accordance with the change in pressure inside the operation chamber. An electro-pneumatic regulator supplies operation gas pressure to the operation chamber. A plurality of pressure sensors having different pressure detection ranges is provided for detecting the operation gas pressure. A controller selectively employs any of the detection results of the plurality of sensors in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.

摘要翻译： 一种液体化学品供应系统，即使当由于液体化学品的类型的变化而导致的操作压力的压力设定值不同时，也能够精确地进行精确的压力反馈控制和控制液体化学品的排出流量，包括具有 泵室和由包括柔性膜的隔膜隔开的操作室。 根据操作室内的压力变化进行液体化学品的进出。 电动气动调节器将操作气体压力提供给操作室。 提供具有不同压力检测范围的多个压力传感器用于检测操作气体压力。 控制器根据为每次使用设定的操作空气的压力设定值选择性地使用多个传感器的检测结果，并进行压力反馈控制。

公开(公告)号：US20070122291A1

公开(公告)日：2007-05-31

申请号：US11581464

申请日：2006-10-17

申请人： Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

发明人： Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

IPC分类号： F04B49/00

CPC分类号： F04B49/08

摘要： [Problem] To always perform accurate pressure feedback control, and control the discharge flow rate of liquid chemical with high precision, even in situations in which the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, etc. [Means of solution] A pump 11 has a pump chamber 13 and an operation chamber 14 separated by a diaphragm 12 comprised of a flexible membrane, and performs the intake and discharge of liquid chemical in accordance with the change in pressure inside the operation chamber 14. An electro-pneumatic regulator 32 supplies operation air to the operation chamber 14. In addition, in the present system, a plurality of pressure sensors 51, 63 having different pressure detection ranges is provided as pressure detection means for detecting the operation air pressure. A controller 40 selectively employs any of the detection results of the plurality of sensors 51, 63 in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.

摘要翻译： [问题]为了始终进行精确的压力反馈控制，并且即使在由于液体化学品的类型的变化而导致的操作压力的设定值不同的情况下也能够高精度地控制液体化学品的排出流量。 [解决方案]泵11具有由柔性膜构成的隔膜12隔开的泵室13和操作室14，并根据操作室14内的压力变化进行液体化学品的进出。 。 电动气动调节器32将操作空气供给到操作室14。 此外，在本系统中，具有不同压力检测范围的多个压力传感器51,63被设置为用于检测操作空气压力的压力检测装置。 控制器40根据为每次使用设定的操作空气的压力设定值选择性地使用多个传感器51,63的检测结果中的任一个，并进行压力反馈控制。

公开(公告)号：US5134962A

公开(公告)日：1992-08-04

申请号：US524378

申请日：1990-05-16

申请人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

发明人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

IPC分类号： G03F7/16 ,  B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  G11B5/842 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： H01L21/6715 ,  B05C11/08

摘要： The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

摘要翻译： 本发明涉及一种用于以固定速率供给清洁液体的旋涂装置。 在现有技术中的任何一个进料装置中，除了过滤器之外的其它成分都不具有消除异物的功能，并且不能实现在精确控制下供给液体的操作。 这导致进料液体中异物（和气泡）的混合以及进料速度不均匀以及进料量的问题。 作为解决这些问题的方法，本发明提供了自动检测和排除外来物质的因素的功能，以及用于自动和精确地控制诸如泵的进料控制元件的装置，由此将清洁液体进料恒定 数量和恒定速度。