发明授权
US07686968B2 Composition for removing conductive materials and manufacturing method of array substrate using the same 有权
用于除去导电材料的组合物及使用其的阵列基板的制造方法

Composition for removing conductive materials and manufacturing method of array substrate using the same
摘要:
A composition for removing a conductive material and a manufacturing method of an array substrate using the composition, wherein the composition may include a nitric acid of about 3 to 15 wt %, a phosphoric acid of about 40 to 70 wt %, an acetic acid of about 5 to 35 wt %. The composition may further include a chlorine compound of about 0.05 to 5 wt %, a chlorine stabilizer of about 0.01 to 5 wt %, a pH stabilizer of about 0.01 to 5 wt %, and water of residual quantity.
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