公开(公告)号：US08377325B2

公开(公告)日：2013-02-19

申请号：US13032563

申请日：2011-02-22

Applicant: Nam-Seok Suh ,  Sun-Young Hong ,  Jong-Hyun Choung ,  Bong-Kyun Kim ,  Hong-Sick Park ,  Jean-Ho Song ,  Wang-Woo Lee ,  Do-Won Kim ,  Sang-Woo Kim ,  Won-Guk Seo ,  Hyun-Cheol Shin ,  Ki-Beom Lee ,  Sam-Young Cho

Inventor： Nam-Seok Suh ,  Sun-Young Hong ,  Jong-Hyun Choung ,  Bong-Kyun Kim ,  Hong-Sick Park ,  Jean-Ho Song ,  Wang-Woo Lee ,  Do-Won Kim ,  Sang-Woo Kim ,  Won-Guk Seo ,  Hyun-Cheol Shin ,  Ki-Beom Lee ,  Sam-Young Cho

IPC: B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C25F3/00

CPC classification number: C09K13/08 ,  C23F1/18 ,  C23F1/26 ,  C23F1/44 ,  H01L21/28088 ,  H01L21/32134 ,  H01L27/1214 ,  H01L27/124 ,  H05K3/067

Abstract: Exemplary embodiments of the present invention provide a metal wiring etchant. A metal wiring etchant according to an exemplary embodiment of the present invention includes ammonium persulfate, an organic acid, an ammonium salt, a fluorine-containing compound, a glycol-based compound, and an azole-based compound.

Abstract translation: 本发明的示例性实施方案提供金属线路蚀刻剂。 根据本发明的示例性实施方式的金属线蚀刻剂包括过硫酸铵，有机酸，铵盐，含氟化合物，二醇类化合物和唑类化合物。

公开(公告)号：US20100291722A1

公开(公告)日：2010-11-18

申请号：US12777532

申请日：2010-05-11

Applicant: Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

Inventor： Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

IPC: H01L33/44 ,  C09K13/08 ,  H01L33/00

CPC classification number: C23F1/26 ,  C23F1/18 ,  H01L21/32134 ,  H01L27/124 ,  H01L29/458

Abstract: An etchant includes about 0.1 percent by weight to about 30 percent by weight of ammonium persulfate (NH4)2S2O8, about 0.1 percent by weight to about 10 percent by weight of an inorganic acid, about 0.1 percent by weight to about 10 percent by weight of an acetate salt, about 0.01 percent by weight to about 5 percent by weight of a fluorine-containing compound, about 0.01 percent by weight to about 5 percent by weight of a sulfonic acid compound, about 0.01 percent by weight to about 2 percent by weight of an azole compound, and a remainder of water. Accordingly, the etchant may have high stability to maintain etching ability. Thus, manufacturing margins may be improved so that manufacturing costs may be reduced.

Abstract translation: 蚀刻剂包括约0.1重量％至约30重量％的过硫酸铵（NH 4）2 S 2 O 8，约0.1重量％至约10重量％的无机酸，约0.1重量％至约10重量％的 约0.01重量％至约5重量％的含氟化合物的乙酸盐，约0.01重量％至约5重量％的磺酸化合物，约0.01重量％至约2重量％ 的唑类化合物，剩余的水。 因此，蚀刻剂可能具有高稳定性以保持蚀刻能力。 因此，可以提高制造裕度，从而可以降低制造成本。

公开(公告)号：US07110168B2

公开(公告)日：2006-09-19

申请号：US10847109

申请日：2004-05-17

Applicant: Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Hyun-Cheol Shin ,  Yun-Je Oh ,  Seong-Taek Hwang

Inventor： Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Hyun-Cheol Shin ,  Yun-Je Oh ,  Seong-Taek Hwang

IPC: H04B10/12

CPC classification number: H04B10/506 ,  H01S3/2333 ,  H01S3/2383 ,  H01S5/005 ,  H01S5/5072 ,  H01S2301/02

Abstract: Disclosed are optical signal transmission apparatus including a reflective gain-clamped semiconductor optical amplifier and optical communication system using the optical signal transmission apparatus, which can improve modulation speed and optical power by effectively suppressing intensity noise of an incoherent light source. The optical signal transmission apparatus comprises a light source; a reflective gain-clamped semiconductor optical amplifier to generate gain-clamped optical signals having a substantially constant output intensity in a gain saturation region; a wavelength division multiplexing apparatus configured to spectrum-slice light from the light source, provide the spectrum-sliced light to the reflective gain-clamped semiconductor optical amplifier, and multiplex optical signals gain-clamped by the reflective gain-clamped optical amplifier, and a circulator for inputting the light generated by the light source to the wavelength division multiplexing apparatus, and outputting the optical signal multiplexed by the wavelength division multiplexing apparatus to a transmission link.

Abstract translation: 公开了包括使用光信号传输装置的反射增益钳位半导体光放大器和光通信系统的光信号传输装置，其可以通过有效地抑制非相干光源的强度噪声来提高调制速度和光功率。 光信号传输装置包括光源; 反射增益钳位半导体光放大器，用于产生在增益饱和区中具有基本上恒定的输出强度的增益钳位光信号; 波长分割多路复用装置，被配置为对来自光源的光进行光谱分片，向经反射增益钳位的半导体光放大器提供频谱切割的光，并对由反射增益钳位的光放大器进行增益钳位的多路复用光信号，以及 循环器，用于将由光源产生的光输入到波分多路复用装置，并将由波分多路复用装置复用的光信号输出到传输链路。

公开(公告)号：US07046435B2

公开(公告)日：2006-05-16

申请号：US10937625

申请日：2004-09-09

Applicant: Hyun-Cheol Shin ,  Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Seong-Taek Hwang

Inventor： Hyun-Cheol Shin ,  Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Seong-Taek Hwang

IPC: H01S3/00

CPC classification number: H01S5/50 ,  H01S5/028 ,  H01S5/101 ,  H01S5/1064 ,  H01S5/1085 ,  H01S5/16 ,  H01S5/227 ,  H01S2301/176

Abstract: A reflective semiconductor optical amplifier includes a substrate, a waveguide with a buried heterostructure formed by sequentially laminating a lower cladding, an active layer, and an upper cladding on the substrate, the waveguide including, sequentially, respective straight line, curved and tapered waveguide regions. A current blocking layer surrounds the waveguide to prevent electric current from flowing outside the active layer. Selectively etching portions of the current blocking layer and the substrate around the waveguide forms a trench to reduce parasitic capacitance. Further features include a window region on one end of the tapered waveguide region, an anti-reflection surface on one end of the window region, and a high-reflection surface on one end of the straight line waveguide region.

Abstract translation: 反射半导体光放大器包括基板，具有通过在基板上依次层叠下包层，有源层和上包层而形成的掩埋异质结构的波导，波导依次包括相应的直线，弯曲和锥形波导区域 。 电流阻挡层围绕波导以防止电流流过有源层外部。 选择性地蚀刻电流阻挡层和波导周围的衬底的部分形成沟槽以减小寄生电容。 另外的特征包括在锥形波导区域的一端上的窗口区域，窗口区域的一端上的防反射面以及直线波导区域的一端的高反射面。

公开(公告)号：US20050088724A1

公开(公告)日：2005-04-28

申请号：US10847109

申请日：2004-05-17

Applicant: Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Hyun-Cheol Shin ,  Yun-Je Oh ,  Seong-Taek Hwang

Inventor： Jeong-Seok Lee ,  Ho-In Kim ,  In-Kuk Yun ,  Seung-Woo Kim ,  Hyun-Cheol Shin ,  Yun-Je Oh ,  Seong-Taek Hwang

IPC: H01S5/50 ,  G02B6/28 ,  H01S3/00 ,  H01S3/23 ,  H01S5/00 ,  H04B10/2507 ,  H04B10/40 ,  H04B10/50 ,  H04B10/60 ,  H04J14/00 ,  H04J14/02

CPC classification number: H04B10/506 ,  H01S3/2333 ,  H01S3/2383 ,  H01S5/005 ,  H01S5/5072 ,  H01S2301/02

Abstract: Disclosed are optical signal transmission apparatus including a reflective gain-clamped semiconductor optical amplifier and optical communication system using the optical signal transmission apparatus, which can improve modulation speed and optical power by effectively suppressing intensity noise of an incoherent light source. The optical signal transmission apparatus comprises a light source; a reflective gain-clamped semiconductor optical amplifier to generate gain-clamped optical signals having a substantially constant output intensity in a gain saturation region; a wavelength division multiplexing apparatus configured to spectrum-slice light from the light source, provide the spectrum-sliced light to the reflective gain-clamped semiconductor optical amplifier, and multiplex optical signals gain-clamped by the reflective gain-clamped optical amplifier. and a circulator for inputting the light generated by the light source to the wavelength division multiplexing apparatus, and outputting the optical signal multiplexed by the wavelength division multiplexing apparatus to a transmission link.

Abstract translation: 公开了包括使用光信号传输装置的反射增益钳位半导体光放大器和光通信系统的光信号传输装置，其可以通过有效地抑制非相干光源的强度噪声来提高调制速度和光功率。 光信号传输装置包括光源; 反射增益钳位半导体光放大器，用于产生在增益饱和区中具有基本上恒定的输出强度的增益钳位光信号; 波分多路复用装置，被配置为对来自光源的光进行光谱分片，将光谱切片光提供给反射增益钳位半导体光放大器，并且复用由反射增益钳位光放大器增益钳位的光信号。 以及循环器，用于将由光源产生的光输入到波分复用装置，并将由波分多路复用装置复用的光信号输出到传输链路。

公开(公告)号：US08262928B2

公开(公告)日：2012-09-11

申请号：US12777532

申请日：2010-05-11

Applicant: Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

Inventor： Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

IPC: H01L33/44 ,  C09K13/08

CPC classification number: C23F1/26 ,  C23F1/18 ,  H01L21/32134 ,  H01L27/124 ,  H01L29/458

Abstract: An etchant includes about 0.1 percent by weight to about 30 percent by weight of ammonium persulfate (NH4)2S2O8, about 0.1 percent by weight to about 10 percent by weight of an inorganic acid, about 0.1 percent by weight to about 10 percent by weight of an acetate salt, about 0.01 percent by weight to about 5 percent by weight of a fluorine-containing compound, about 0.01 percent by weight to about 5 percent by weight of a sulfonic acid compound, about 0.01 percent by weight to about 2 percent by weight of an azole compound, and a remainder of water. Accordingly, the etchant may have high stability to maintain etching ability. Thus, manufacturing margins may be improved so that manufacturing costs may be reduced.

Abstract translation: 蚀刻剂包括约0.1重量％至约30重量％的过硫酸铵（NH 4）2 S 2 O 8，约0.1重量％至约10重量％的无机酸，约0.1重量％至约10重量％的 约0.01重量％至约5重量％的含氟化合物的乙酸盐，约0.01重量％至约5重量％的磺酸化合物，约0.01重量％至约2重量％ 的唑类化合物，剩余的水。 因此，蚀刻剂可能具有高稳定性以保持蚀刻能力。 因此，可以提高制造裕度，从而可以降低制造成本。

公开(公告)号：US20120295380A1

公开(公告)日：2012-11-22

申请号：US13566239

申请日：2012-08-03

Applicant: Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

Inventor： Bong-Kyun Kim ,  Jong-Hyun Choung ,  Byeong-Jin Lee ,  Sun-Young Hong ,  Hong-Sick Park ,  Shi-Yul Kim ,  Ki-Beom Lee ,  Sam-Young Cho ,  Sang-Woo Kim ,  Hyun-Cheol Shin ,  Won-Guk Seo

IPC: H01L33/08

CPC classification number: C23F1/26 ,  C23F1/18 ,  H01L21/32134 ,  H01L27/124 ,  H01L29/458

Abstract: An etchant includes about 0.1 percent by weight to about 30 percent by weight of ammonium persulfate (NH4)2S2O8, about 0.1 percent by weight to about 10 percent by weight of an inorganic acid, about 0.1 percent by weight to about 10 percent by weight of an acetate salt, about 0.01 percent by weight to about 5 percent by weight of a fluorine-containing compound, about 0.01 percent by weight to about 5 percent by weight of a sulfonic acid compound, about 0.01 percent by weight to about 2 percent by weight of an azole compound, and a remainder of water. Accordingly, the etchant may have high stability to maintain etching ability. Thus, manufacturing margins may be improved so that manufacturing costs may be reduced.

Abstract translation: 蚀刻剂包括约0.1重量％至约30重量％的过硫酸铵（NH 4）2 S 2 O 8，约0.1重量％至约10重量％的无机酸，约0.1重量％至约10重量％的 约0.01重量％至约5重量％的含氟化合物的乙酸盐，约0.01重量％至约5重量％的磺酸化合物，约0.01重量％至约2重量％ 的唑类化合物，剩余的水。 因此，蚀刻剂可能具有高稳定性以保持蚀刻能力。 因此，可以提高制造裕度，从而可以降低制造成本。

公开(公告)号：US07398021B2

公开(公告)日：2008-07-08

申请号：US11052400

申请日：2005-02-07

Applicant: Hong-Seok Shin ,  Hyun-Cheol Shin ,  Seong-Taek Hwang ,  Dae-Kwang Jung

Inventor： Hong-Seok Shin ,  Hyun-Cheol Shin ,  Seong-Taek Hwang ,  Dae-Kwang Jung

IPC: H04J14/00

CPC classification number: H04J14/0282 ,  H04J14/02 ,  H04J14/0226 ,  H04J14/0246 ,  H04J14/025 ,  H04J2014/0253

Abstract: An optical transmitter including a multi-lambda source to output injection light consisting of a plurality of injection wavelengths in channels, a circulator having a first port, a second port, and a third port, the circulator receiving the injection light at the first port, and outputting the received injection light to the second port, and further receiving signal light at the second port, and outputting the received signal light to the third port, an arrayed waveguide grating having a multiplexing port connected to the second port of the circulator, and a plurality of demultiplexing ports, spectrum-slicing injection light received from the circulator at the multiplexing port into a plurality of injection channels, and outputting the injection channels to the demultiplexing ports and further receiving and multiplexing a plurality of signal channels at the demultiplexing ports, into a signal light, and outputting the signal light to the multiplexing port, and a plurality of reflective semiconductor optical amplifiers connected to the demultiplexing ports of the arrayed waveguide grating, respectively, each of the reflective semiconductor optical amplifiers receiving an associated one of the injection channels, and amplifying the associated injection channel to generate an associated one of the signal channels.

Abstract translation: 一种光发射机，包括多λ源，以输出由通道中的多个注入波长组成的注入光，具有第一端口，第二端口和第三端口的循环器，所述循环器在第一端口处接收注入光， 并将所接收的注入光输出到第二端口，并且还在第二端口处接收信号光，并将接收到的信号光输出到第三端口;阵列波导光栅，具有连接到循环器的第二端口的多路复用端口;以及 多个解复用端口，从多路复用端口的循环器接收的频谱分片注入光分成多个注入通道，并且将注入通道输出到解复用端口，并进一步在多路分用端口处接收和复用多个信号通道， 信号光，并将信号光输出到多路复用端口，以及多个反射 分别连接到阵列波导光栅的解复用端口的半导体光放大器，反射半导体光放大器中的每一个接收相关联的一个注入通道，以及放大关联的注入通道以产生相关联的一个信号通道。

公开(公告)号：US07224519B2

公开(公告)日：2007-05-29

申请号：US10798662

申请日：2004-03-11

Applicant: Hyun-Cheol Shin ,  Jeong-Seok Lee ,  Seong-Taek Hwang ,  Dae-Kwang Jung

Inventor： Hyun-Cheol Shin ,  Jeong-Seok Lee ,  Seong-Taek Hwang ,  Dae-Kwang Jung

IPC: H01S5/50 ,  H04J14/02

CPC classification number: H01S5/14 ,  H01S5/0265 ,  H01S5/028 ,  H01S5/06812 ,  H01S5/1085 ,  H01S5/1092

Abstract: A multi-wavelength light source includes a substrate, a fabry-perot laser laminated on the substrate that is operated by driving current below a predetermined threshold current to generate multi-wavelength light including a plurality of peaks whose wavelengths and spacing are identical to these of WDM channels. A semiconductor optical amplifier (SOA) is laminated on the substrate in an arrangement such that a slant surface of the SOA is opposed to a side surface of the fabry-perot laser, which serves to thereby amplify the multi-wavelength light output from the fabry-perot laser. The semiconductor optical amplifier is driven in a gain saturation state to reduce the relative intensity of noise in the channels of the multi-wavelength light that are simultaneously amplified.

Abstract translation: 多波长光源包括基板，层叠在基板上的fabry-perot激光器，其通过驱动低于预定阈值电流的电流来操作，以产生多波长光，其包括波长和间距与 WDM频道 半导体光放大器（SOA）以这样的布置层压在基板上，使得SOA的倾斜表面与fabry-perot激光器的侧表面相对，其用于放大来自fabry的多波长光输出 激光激光 半导体光放大器以增益饱和状态驱动，以减少同时放大的多波长光的通道中的噪声的相对强度。

公开(公告)号：US20050276602A1

公开(公告)日：2005-12-15

申请号：US11052400

申请日：2005-02-07

Applicant: Hong-Seok Shin ,  Hyun-Cheol Shin ,  Seong-Taek Hwang ,  Dae-Kwang Jung

Inventor： Hong-Seok Shin ,  Hyun-Cheol Shin ,  Seong-Taek Hwang ,  Dae-Kwang Jung

IPC: H04B10/04 ,  H04J14/00 ,  H04J14/02

CPC classification number: H04J14/0282 ,  H04J14/02 ,  H04J14/0226 ,  H04J14/0246 ,  H04J14/025 ,  H04J2014/0253

Abstract: An optical transmitter including a multi-lambda source to output injection light consisting of a plurality of injection wavelengths in channels, a circulator having a first port, a second port, and a third port, the circulator receiving the injection light at the first port, and outputting the received injection light to the second port, and further receiving signal light at the second port, and outputting the received signal light to the third port, an arrayed waveguide grating having a multiplexing port connected to the second port of the circulator, and a plurality of demultiplexing ports, spectrum-slicing injection light received from the circulator at the multiplexing port into a plurality of injection channels, and outputting the injection channels to the demultiplexing ports and further receiving and multiplexing a plurality of signal channels at the demultiplexing ports, into a signal light, and outputting the signal light to the multiplexing port, and a plurality of reflective semiconductor optical amplifiers connected to the demultiplexing ports of the arrayed waveguide grating, respectively, each of the reflective semiconductor optical amplifiers receiving an associated one of the injection channels, and amplifying the associated injection channel to generate an associated one of the signal channels.

Abstract translation: 一种光发射机，包括多λ源，以输出由通道中的多个注入波长组成的注入光，具有第一端口，第二端口和第三端口的循环器，所述循环器在第一端口处接收注入光， 并将所接收的注入光输出到第二端口，并且还在第二端口处接收信号光，并将接收到的信号光输出到第三端口;阵列波导光栅，具有连接到循环器的第二端口的多路复用端口;以及 多个解复用端口，从多路复用端口的循环器接收的频谱分片注入光分成多个注入通道，并将注入通道输出到解复用端口，并进一步在解复用端口接收和复用多个信号通道， 信号光，并将信号光输出到多路复用端口，以及多个反射 分别连接到阵列波导光栅的解复用端口的半导体光放大器，反射半导体光放大器中的每一个接收相关联的一个注入通道，以及放大关联的注入通道以产生相关联的一个信号通道。