Invention Grant
- Patent Title: Apparatus and method for adjusting thermally induced movement of electro-mechanical assemblies
- Patent Title (中): 用于调节机电组件的热诱导运动的装置和方法
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Application No.: US12165325Application Date: 2008-06-30
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Publication No.: US07688063B2Publication Date: 2010-03-30
- Inventor: Andrew W. McFarland , Kevin Youl Yasumura , Eric D. Hobbs , Keith J. Breinlinger
- Applicant: Andrew W. McFarland , Kevin Youl Yasumura , Eric D. Hobbs , Keith J. Breinlinger
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agent N. Kenneth Burraston
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A thermal adjustment apparatus for adjusting one or more thermally induced movements of an electro-mechanical assembly includes: a compensating element expanding at a first rate different from a second rate at which the electro-mechanical assembly expands for generating a counteracting force in response to changes in temperature; and a coupling mechanism coupling the compensating element to the electro-mechanical assembly, and being adjustable to control an amount of the counteracting force applied to the electro-mechanical assembly as temperature changes.
Public/Granted literature
- US20090206860A1 APPARATUS AND METHOD FOR ADJUSTING THERMALLY INDUCED MOVEMENT OF ELECTRO-MECHANICAL ASSEMBLIES Public/Granted day:2009-08-20
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