Invention Grant
US07688435B2 Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect 失效
通过控制相对于特征或缺陷的入射照明平面的角度来检测和分类表面特征或缺陷

  • Patent Title: Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
  • Patent Title (中): 通过控制相对于特征或缺陷的入射照明平面的角度来检测和分类表面特征或缺陷
  • Application No.: US11485798
    Application Date: 2006-07-13
  • Publication No.: US07688435B2
    Publication Date: 2010-03-30
  • Inventor: Steven W. Meeks
  • Applicant: Steven W. Meeks
  • Applicant Address: US CA Milpitas
  • Assignee: KLA-Tencor Corporation
  • Current Assignee: KLA-Tencor Corporation
  • Current Assignee Address: US CA Milpitas
  • Agency: Luedeka, Neely & Graham, P.C.
  • Main IPC: G01N21/00
  • IPC: G01N21/00
Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
Abstract:
Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a single and dual multiple beam techniques. In one embodiment, this the invention uses a pair of orthogonally oriented white light beams, one in the radial and one in the circumferential direction. The scattered light from the radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.
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