发明授权
US07690254B2 Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
有权
传感器与位置无关的驱动电极在多层硅绝缘体衬底上
- 专利标题: Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
- 专利标题(中): 传感器与位置无关的驱动电极在多层硅绝缘体衬底上
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申请号: US11829014申请日: 2007-07-26
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公开(公告)号: US07690254B2公开(公告)日: 2010-04-06
- 发明人: Jorg Pilchowski , Michael J. Foster , Shifang Zhou
- 申请人: Jorg Pilchowski , Uwe Pilchowski, legal representative , Michael J. Foster , Shifang Zhou
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P9/04
摘要:
A microelectromechanical system (MEMS) includes a housing defining an enclosed cavity, stator tines extending from the housing into the cavity, a MEMS device located within the cavity, the MEMS device including a proof mass and rotor tines extending from the proof mass, each rotor tine being positioned at a capacitive distance from a corresponding stator tine. The rotor tines include a first section extending a first distance from an insulating layer of the rotor tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section. The stator tines include a first section extending a first distance from an insulating layer of the stator tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section, the stator tine first distance being greater than the rotor tine first distance.
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