发明授权
US07690254B2 Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate 有权
传感器与位置无关的驱动电极在多层硅绝缘体衬底上

Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
摘要:
A microelectromechanical system (MEMS) includes a housing defining an enclosed cavity, stator tines extending from the housing into the cavity, a MEMS device located within the cavity, the MEMS device including a proof mass and rotor tines extending from the proof mass, each rotor tine being positioned at a capacitive distance from a corresponding stator tine. The rotor tines include a first section extending a first distance from an insulating layer of the rotor tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section. The stator tines include a first section extending a first distance from an insulating layer of the stator tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section, the stator tine first distance being greater than the rotor tine first distance.
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