Invention Grant
US07691694B2 Silicon carbide semiconductor device having junction field effect transistor and method for manufacturing the same 有权
具有结场效应晶体管的碳化硅半导体器件及其制造方法

Silicon carbide semiconductor device having junction field effect transistor and method for manufacturing the same
Abstract:
A silicon carbide semiconductor device includes a substrate and a junction field effect transistor. The transistor includes: a first semiconductor layer disposed on the substrate; a first gate layer disposed on a surface of the first semiconductor layer; a first channel layer adjacent to the first gate layer on the substrate; a first source layer connecting to the first channel layer electrically; a second gate layer adjacent to the first channel layer to sandwich the first channel layer; a second channel layer adjacent to the second gate layer to sandwich the second gate layer; a third gate layer adjacent to the second channel layer to sandwich the second channel layer; and a second source layer connecting to the second channel layer electrically.
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