Invention Grant
- Patent Title: Silicon carbide semiconductor device having junction field effect transistor and method for manufacturing the same
- Patent Title (中): 具有结场效应晶体管的碳化硅半导体器件及其制造方法
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Application No.: US11785276Application Date: 2007-04-17
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Publication No.: US07691694B2Publication Date: 2010-04-06
- Inventor: Rajesh Kumar , Andrei Mihaila , Florin Udrea
- Applicant: Rajesh Kumar , Andrei Mihaila , Florin Udrea
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2003-385094 20031114
- Main IPC: H01L21/337
- IPC: H01L21/337

Abstract:
A silicon carbide semiconductor device includes a substrate and a junction field effect transistor. The transistor includes: a first semiconductor layer disposed on the substrate; a first gate layer disposed on a surface of the first semiconductor layer; a first channel layer adjacent to the first gate layer on the substrate; a first source layer connecting to the first channel layer electrically; a second gate layer adjacent to the first channel layer to sandwich the first channel layer; a second channel layer adjacent to the second gate layer to sandwich the second gate layer; a third gate layer adjacent to the second channel layer to sandwich the second channel layer; and a second source layer connecting to the second channel layer electrically.
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